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IPA mist direct replacement drying device

IPA mist direct replacement drying device

IPA mist direct replacement drying device utilizing IPA vaporless and Marangoni convection.

We propose the "Watermarkless Drying Device," developed through our many years of experience in the design and manufacturing of IPA vapor drying equipment, along with the know-how we have cultivated through numerous case studies, utilizing IPA vapor-less drying and Marangoni convection for continuous improvement. By directly replacing the IPA after cleaning the Si wafer, we can achieve a surface free of water droplets without exposing it to the atmosphere, allowing for a direct replacement of the Si wafer surface from "pure water to IPA." 【Features】 ■ Watermarkless drying ■ Suppression of particle re-adhesion ■ IPA vapor-less ■ Reduction in IPA consumption ■ Capable of drying a wide range of materials ■ Customized design to meet customer needs *For more details, please download the PDF or contact us.

  • Drying Equipment
  • Direct Displacement Dryer

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IPA Mist Direct Replacement Drying Device 'IMD IIID'

IPA Mist Direct Replacement Drying Device 'IMD IIID'

Utilizing the Marangoni effect! Developed for the drying of thin wafers in power device manufacturing.

When using our conventional product "IMD III" for drying thin wafers, a problem arose where adjacent wafers came into contact when separating the wafer from the carrier, leading to inadequate drying. The "IMD IIID" holds the upper part of the wafer immediately after it emerges from the pure water surface, following the start of the drying process with pure water withdrawal. By subsequently separating the wafer from the carrier, it prevents contact between wafers, providing drying capabilities equivalent to carrierless drying. 【Features】 ■ Watermark-free drying ■ Marangoni drying using pure water withdrawal method ■ Drying of thin wafers, which is difficult with conventional drying methods ■ Reduction in IPA consumption (10-20cc/1 batch) ■ Capable of drying 3” to 8” wafers *For more details, please refer to the PDF document or feel free to contact us.

  • Drying Equipment
  • Direct Displacement Dryer

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